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Publication Citation: Scanning Capacitance Microscopy Applied to 2D Dopant Profiling of Semiconductors

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Author(s): Joseph J. Kopanski; Jay F. Marchiando; J R. Lowney;
Title: Scanning Capacitance Microscopy Applied to 2D Dopant Profiling of Semiconductors
Published: December 31, 1997
Abstract:
Proceedings: Proc., 3rd International Workshop on Expert Evaluation and Control of Compound Semiconductor Materials and Technologies
Pages: pp. 46 - 51
Location: Freiburg, GM
Dates: May 11-15, 1996
Research Areas: