Publication Citation
NIST Authors in Bold
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| Author(s): | Joseph J. Kopanski; Jay F. Marchiando; J R. Lowney; |
|---|---|
| Title: | Scanning Capacitance Microscopy Applied to 2D Dopant Profiling of Semiconductors |
| Published: | December 31, 1997 |
| Abstract: | |
| Proceedings: | Proc., 3rd International Workshop on Expert Evaluation and Control of Compound Semiconductor Materials and Technologies |
| Pages: | pp. 46 - 51 |
| Location: | Freiburg, GM |
| Dates: | May 11-15, 1996 |
| Research Areas: |