High-accuracy epitaxial A1GaAs composition determination with inductivity coupled plasma optical emission spectroscopy

Kristine A. Bertness; C M. Wang; Marc L. Salit; Gregory C. Turk; Therese A. Butler; Albert J. Paul; Lawrence H. Robins

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PUBLICATIONS

High-accuracy epitaxial A1GaAs composition determination with inductivity coupled plasma optical emission spectroscopy

Published

September 1, 2006

Author(s)

Kristine A. Bertness, C M. Wang, Marc L. Salit, Gregory C. Turk, Therese A. Butler, Albert J. Paul, Lawrence H. Robins

Citation

Journal of Vacuum Science and Technology B

Volume

Issue

Pub Type

Journals

Biomaterials and Ceramics

Citation

Bertness, K. , Wang, C. , Salit, M. , Turk, G. , Butler, T. , Paul, A. and Robins, L. (2006), High-accuracy epitaxial A1GaAs composition determination with inductivity coupled plasma optical emission spectroscopy, Journal of Vacuum Science and Technology B (Accessed April 16, 2024)

Created September 1, 2006, Updated February 19, 2017

High-accuracy epitaxial A1GaAs composition determination with inductivity coupled plasma optical emission spectroscopy

Author(s)

Citation

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