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Publication Citation: Combinatorial Methods Study of Confinement Effects on the Reaction Front in Ultrathin Chemically Amplified Photoresists

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Author(s): M Wang; Eric K. Lin; Alamgir Karim; Michael J. Fasolka;
Title: Combinatorial Methods Study of Confinement Effects on the Reaction Front in Ultrathin Chemically Amplified Photoresists
Published: January 01, 2003
Abstract:
Conference: Characterization and Metrology for ULSI Technology: 2003 International Conference
Location: Austin, TX
Keywords: Combinatorial and THE Methods;Lithography;Thin Films;chemically amplified resist;combinatorial method;thin film
Research Areas:
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