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NIST Authors in Bold
|Author(s):||George D. Quinn; Lin-Sien H. Lum; Dan Xiang; Ajitkumar Jillavenkatesa; Li Ma; Douglas T. Smith;|
|Title:||A Novel Test Method for Measuring Mechanical Properties at the Small-Scale: The Theta Specimen|
|Published:||June 09, 2005|
|Abstract:||A test method has been developed for measuring mechanical properties of material structures at the small-scale. Round or hexagonal rings are compressed vertically on their ends thereby creating a uniform tension stress in a horizontal crossbar that serves as the gauge section. The compression loading scheme is simple and eliminates the need for special grips. A conventional nanoindentation hardness machine serves as a small-scale universal testing machine that applies load and monitors displacement. Prototype miniature silicon specimens were fabricated by deep reactive ion etching (DRIE) of a single crystal wafer and were tested to fracture. Finite element analysis confirmed that the stress distribution was very uniform in the web portion of the specimen. The theta specimen is a versatile configuration and has great potential for use with a variety of materials and for testing extremely small structures.|
|Conference:||Ceramic Engineering and Science Conference|
|Proceedings:||29th International Conf. On Advanced Ceramics & Composites|
|Pages:||pp. 117 - 126|
|Dates:||January 28-29, 2005|
|Keywords:||DRIE,fracture origin,silicon,theta specimen|
|Research Areas:||Ceramics, Characterization|