| Author(s): |
George D. Quinn; Lin-Sien H. Lum; Dan Xiang; Ajitkumar Jillavenkatesa; Li Ma; Douglas T. Smith; |
| Title: |
A Novel Test Method for Measuring Mechanical Properties at the Small-Scale: The Theta Specimen |
| Published: |
June 09, 2005 |
| Abstract: |
A test method has been developed for measuring mechanical properties of material structures at the small-scale. Round or hexagonal rings are compressed vertically on their ends thereby creating a uniform tension stress in a horizontal crossbar that serves as the gauge section. The compression loading scheme is simple and eliminates the need for special grips. A conventional nanoindentation hardness machine serves as a small-scale universal testing machine that applies load and monitors displacement. Prototype miniature silicon specimens were fabricated by deep reactive ion etching (DRIE) of a single crystal wafer and were tested to fracture. Finite element analysis confirmed that the stress distribution was very uniform in the web portion of the specimen. The theta specimen is a versatile configuration and has great potential for use with a variety of materials and for testing extremely small structures. |
| Conference: |
Ceramic Engineering and Science Conference |
| Proceedings: |
29th International Conf. On Advanced Ceramics & Composites |
| Volume: |
26 |
| Issue: |
2 |
| Pages: |
pp. 117 - 126 |
| Dates: |
January 28-29, 2005 |
| Keywords: |
DRIE;fracture origin;silicon;theta specimen |
| Research Areas: |
Characterization, Ceramics |
