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Publication Citation: A Novel Test Method for Measuring Mechanical Properties at the Small-Scale: The Theta Specimen

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Author(s): George D. Quinn; Lin-Sien H. Lum; Dan Xiang; Ajitkumar Jillavenkatesa; Li Ma; Douglas T. Smith;
Title: A Novel Test Method for Measuring Mechanical Properties at the Small-Scale: The Theta Specimen
Published: June 09, 2005
Abstract: A test method has been developed for measuring mechanical properties of material structures at the small-scale. Round or hexagonal rings are compressed vertically on their ends thereby creating a uniform tension stress in a horizontal crossbar that serves as the gauge section. The compression loading scheme is simple and eliminates the need for special grips. A conventional nanoindentation hardness machine serves as a small-scale universal testing machine that applies load and monitors displacement. Prototype miniature silicon specimens were fabricated by deep reactive ion etching (DRIE) of a single crystal wafer and were tested to fracture. Finite element analysis confirmed that the stress distribution was very uniform in the web portion of the specimen. The theta specimen is a versatile configuration and has great potential for use with a variety of materials and for testing extremely small structures.
Conference: Ceramic Engineering and Science Conference
Proceedings: 29th International Conf. On Advanced Ceramics & Composites
Volume: 26
Issue: 2
Pages: pp. 117 - 126
Dates: January 28-29, 2005
Keywords: DRIE;fracture origin;silicon;theta specimen
Research Areas: Characterization, Ceramics