| Author(s): |
J B. Fowler; Maritoni A. Litorja; |
| Title: |
Geometric Area Measurements of Circular Apertures for Radiometry at NIST |
| Published: |
February 01, 2003 |
| Abstract: |
NIST has established a geometric aperture-area measurement facility for circular apertures. The instrument consists of an interferometrically controlled XY translation stage for high-accuracy positioning and a video microscope for detection fo the aperture edge. Least-squares fitting of the edge points located along the aperture's inner circumference to the equation of a circle is used to determine the geometric area. In this paper we describe the measurement method, based on the work started and described by Fowler, Durvasula and Parr [1]. Analysis and estimation of various contributions to the overall measurement uncertainty, including the effects of diffraction and partial coherence of light on the edge location are also discussed. |
| Citation: |
Metrologia |
| Volume: |
40 |
| Issue: |
No. 1 |
| Keywords: |
apertures;metrology;microscopy;radiometry |
| Research Areas: |
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| PDF version: |
 Click here to retrieve PDF version of paper (71KB) |
