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Publication Citation: Geometric Area Measurements of Circular Apertures for Radiometry at NIST

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Author(s): J B. Fowler; Maritoni A. Litorja;
Title: Geometric Area Measurements of Circular Apertures for Radiometry at NIST
Published: February 01, 2003
Abstract: NIST has established a geometric aperture-area measurement facility for circular apertures. The instrument consists of an interferometrically controlled XY translation stage for high-accuracy positioning and a video microscope for detection fo the aperture edge. Least-squares fitting of the edge points located along the aperture's inner circumference to the equation of a circle is used to determine the geometric area. In this paper we describe the measurement method, based on the work started and described by Fowler, Durvasula and Parr [1]. Analysis and estimation of various contributions to the overall measurement uncertainty, including the effects of diffraction and partial coherence of light on the edge location are also discussed.
Citation: Metrologia
Volume: 40
Issue: No. 1
Keywords: apertures;metrology;microscopy;radiometry
Research Areas:
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