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|Author(s):||Thomas A. Germer; Clara C. Asmail;|
|Title:||Polarization of Light Scattered by Microrough Surfaces and Subsurface Defects|
|Published:||June 01, 1999|
|Abstract:||The polarization of light scattered into directions out of the plane of incidence for 532 nm light incident at 45 with p-polarization was measured from rough silicon, rough titanium nitride, polished fused silica and glass ceramic, and ground and incompletely polished black glass. Models for polarized light scattering from microroughness, subsurface defects, and facets are reviewed. The measurements demonstrate the validity of the models and the utility of polarized light scattering measurements for distinguishing between roughness and defects.|
|Citation:||Journal of the Optical Society of America A-Optics Image Science and Vision|
|Keywords:||bidirectional ellipsometry,microroughness,polarimetry,scatter,subsurface defects,surfaces|