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|Author(s):||John H. Burnett; Simon G. Kaplan;|
|Title:||Measurement of the Refractive Index and Thermo-Optic Coefficient of Water Near 193 NM|
|Abstract:||We discuss our approaches for measuring the absolute index (n) and its dependencies on wavelength (dn/d(lambda)) and temperature (dn/dT), of high-purity water for wavelengths near 193 nm, using the minimum deviation prism method and an interferometric technique. We present preliminary results for these quantities measured by the minimum deviation method.|
|Keywords:||193 nm immersion lithography,index of refraction,refractive index,thermo-optic coefficient,water|