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Publication Citation: Measurement of the Refractive Index and Thermo-Optic Coefficient of Water Near 193 NM

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Author(s): John H. Burnett; Simon G. Kaplan;
Title: Measurement of the Refractive Index and Thermo-Optic Coefficient of Water Near 193 NM
Published: Date Unknown
Abstract: We discuss our approaches for measuring the absolute index (n) and its dependencies on wavelength (dn/d(lambda)) and temperature (dn/dT), of high-purity water for wavelengths near 193 nm, using the minimum deviation prism method and an interferometric technique. We present preliminary results for these quantities measured by the minimum deviation method.
Citation: SPIE Meeting
Keywords: 193 nm immersion lithography;index of refraction;refractive index;thermo-optic coefficient;water
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