| Author(s): |
John H. Burnett; Simon G. Kaplan; |
| Title: |
Measurement of the Refractive Index and Thermo-Optic Coefficient of Water Near 193 NM |
| Published: |
Date Unknown |
| Abstract: |
We discuss our approaches for measuring the absolute index (n) and its dependencies on wavelength (dn/d(lambda)) and temperature (dn/dT), of high-purity water for wavelengths near 193 nm, using the minimum deviation prism method and an interferometric technique. We present preliminary results for these quantities measured by the minimum deviation method. |
| Citation: |
SPIE Meeting |
| Keywords: |
193 nm immersion lithography;index of refraction;refractive index;thermo-optic coefficient;water |
| Research Areas: |
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