Publication Citation
NIST Authors in Bold
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| Author(s): | Charles S. Tarrio; Steven Grantham; |
|---|---|
| Title: | Synchrotron Beamline for Extreme-Ultraviolet Multilayer Mirror Endurance Testing |
| Published: | May 01, 2005 |
| Abstract: | |
| Citation: | Review of Scientific Instruments |
| Volume: | 76 No. 5 |
| Keywords: | endurance testing;environmental studies;extreme;lifetime testing;multilayer mirrors;ultraviolet lithography |
| Research Areas: |