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Publication Citation: Synchrotron Beamline for Extreme-Ultraviolet Multilayer Mirror Endurance Testing

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Author(s): Charles S. Tarrio; Steven E. Grantham;
Title: Synchrotron Beamline for Extreme-Ultraviolet Multilayer Mirror Endurance Testing
Published: May 01, 2005
Abstract:
Citation: Review of Scientific Instruments
Volume: 76 No. 5
Keywords: endurance testing;environmental studies;extreme;lifetime testing;multilayer mirrors;ultraviolet lithography
Research Areas: