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Publication Citation: Metrology for EUV Lithography Sources and Tools

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Author(s): Steven E. Grantham; Charles S. Tarrio; Robert E. Vest; Thomas B. Lucatorto;
Title: Metrology for EUV Lithography Sources and Tools
Published: July 03, 2006
Abstract:
Citation: SPIE
Keywords: discharge plasma source;extreme ultraviolet;laser-produced plasma source;metrology;radiometry;reflectometry
Research Areas: