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Publication Citation: A Simple Transfer-Optics System for an Extreme-Ultraviolet Synchrotron Beamline

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Author(s): Charles S. Tarrio; Steven E. Grantham; Robert E. Vest; K Liu;
Title: A Simple Transfer-Optics System for an Extreme-Ultraviolet Synchrotron Beamline
Published: April 01, 2005
Abstract: Beamlines at synchrotron radiation facilities often have interchangeable endstations to allow several different experiments to use the output of a single monochromator. However, for endstations that are sufficiently large, this is not possible. We have developed a simple transfer optics system that allows endstations to be attached to the exit flange of a large extreme-ultraviolet reflectometry facility. The system works as desired and predicted, and we will present preliminary results for two different experiments that use these optics.
Citation: Review of Scientific Instruments
Volume: 74
Issue: No 4
Keywords: detector packages;detectors;EUV lithography;extreme ultraviolet;radiometry;responsivity;synchrotron
Research Areas: