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|Author(s):||Charles S. Tarrio; Steven E. Grantham; Robert E. Vest; K Liu;|
|Title:||A Simple Transfer-Optics System for an Extreme-Ultraviolet Synchrotron Beamline|
|Published:||April 01, 2005|
|Abstract:||Beamlines at synchrotron radiation facilities often have interchangeable endstations to allow several different experiments to use the output of a single monochromator. However, for endstations that are sufficiently large, this is not possible. We have developed a simple transfer optics system that allows endstations to be attached to the exit flange of a large extreme-ultraviolet reflectometry facility. The system works as desired and predicted, and we will present preliminary results for two different experiments that use these optics.|
|Citation:||Review of Scientific Instruments|
|Keywords:||detector packages,detectors,EUV lithography,extreme ultraviolet,radiometry,responsivity,synchrotron|