| Author(s): |
Charles S. Tarrio; Steven Grantham; Robert E. Vest; K Liu; |
| Title: |
A Simple Transfer-Optics System for an Extreme-Ultraviolet Synchrotron Beamline |
| Published: |
April 01, 2005 |
| Abstract: |
Beamlines at synchrotron radiation facilities often have interchangeable endstations to allow several different experiments to use the output of a single monochromator. However, for endstations that are sufficiently large, this is not possible. We have developed a simple transfer optics system that allows endstations to be attached to the exit flange of a large extreme-ultraviolet reflectometry facility. The system works as desired and predicted, and we will present preliminary results for two different experiments that use these optics. |
| Citation: |
Review of Scientific Instruments |
| Volume: |
74 |
| Issue: |
No 4 |
| Keywords: |
detector packages;detectors;EUV lithography;extreme ultraviolet;radiometry;responsivity;synchrotron |
| Research Areas: |
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