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Publication Citation: Improved Radiometry For Extreme-Ultraviolet Lithography

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Author(s): Charles S. Tarrio; Robert E. Vest; Steven E. Grantham; K Liu; Thomas B. Lucatorto; Ping-Shine Shaw;
Title: Improved Radiometry For Extreme-Ultraviolet Lithography
Published: November 01, 2004
Abstract: The absolute cryogenic radiometer (ACR), an electrical-substitution-based detector, is the most accurate method for measurement of radiant power in the extreme ultraviolet. At the National Institute of Standards and Technology, ACR-based measurements are currently used as standards from the infrared and into the vacuum ultraviolet, however, no radiometric facilities are currently in operation with enough incident power to use an ACR in the extreme-ultraviolet region. Therefore, we have installed transfer optics on an existing beamline to allow the installation of the ACR as an additional endstation. We will describe the current radiometric beamline, the ACR, and the high-throughput beamline, and the transfer-optical system. Finally, we will present the performance of the transfer optics and measurements of the beam profile and incident power of the new endstation.
Conference: AIP Conference Proceedings
Proceedings: International Conference on Synchrotron Radiation Instrumentation
Volume: 708
Dates: August 25-29, 2003
Keywords: dosimetry;extreme ultraviolet;lithography;photodiodes;radiometry
Research Areas: