| Author(s): |
Charles S. Tarrio; Robert E. Vest; S Grantham; Thomas B. Lucatorto; |
| Title: |
Extreme Ultraviolet Metrology at SURF III |
| Published: |
January 01, 2001 |
| Abstract: |
The last two decades have seen the development normal-incidence multiplayer mirrors and semiconductor photodiodes for extreme ultraviolet (EUV) radiation. Applications such as in astrophysics, lithography, and plasma physics, require precise calibrations of the associated instrumentation. |
| Citation: |
Synchrotron Radiation News |
| Volume: |
14 |
| Keywords: |
extreme ultraviolet;metrology;radiometry;reflectometry;source-based radiometry |
| Research Areas: |
|
