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NIST Authors in Bold
|Author(s):||Charles S. Tarrio; Robert E. Vest; S Grantham; Thomas B. Lucatorto;|
|Title:||Extreme Ultraviolet Metrology at SURF III|
|Published:||January 01, 2001|
|Abstract:||The last two decades have seen the development normal-incidence multiplayer mirrors and semiconductor photodiodes for extreme ultraviolet (EUV) radiation. Applications such as in astrophysics, lithography, and plasma physics, require precise calibrations of the associated instrumentation.|
|Citation:||Synchrotron Radiation News|
|Keywords:||extreme ultraviolet,metrology,radiometry,reflectometry,source-based radiometry|