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Publication Citation: Evaluating Optical Materials

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Author(s): Charles S. Tarrio; Thomas B. Lucatorto;
Title: Evaluating Optical Materials
Published: May 01, 2001
Abstract: curately quantifying optical constants is key to fabricating successful multiplayer film components
Citation: OE Reports
Keywords: extreme ultraviolet;index of refraction;interference;multilayers;optical constants;thin films
Research Areas: