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Publication Citation: Accurate Pattern Registration for Integrated Circuit Tomography

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Author(s): Zachary H. Levine; S Grantham; S Neogi; S P. Frigo; I McNulty; C C. Retsch; Y Wang; Thomas B. Lucatorto;
Title: Accurate Pattern Registration for Integrated Circuit Tomography
Published: July 01, 2001
Abstract: As part of an effort to develop high resolution microtomography for engineered structures, a two-level copper integrated circuit interconnect was imaged using 1.83 keV x-rays at 14 angles employing a full-field Fresnel zone plate microscope. A major requirement for high resolution microtomography is the accurate registration of the reference axes in each of the many views needed for a reconstruction. A reconstruction with 100 nm resolution would require registration accuracy of 30 nm or better. This work demonstrates that even images that have strong interference fringes can be used to obtain accurate fiducials through the use of Radon transforms. We show that we are able to locate the co-oridinates of the rectilinear circuit patterns to 28 nm. The procedure is validated by agreement between an x-ray parallax measurement of 1.41 0.7 m and a measurement of 1.58 0.08 m from an scanning electron microscope image of a cross section.
Citation: Journal of Applied Physics
Volume: 90
Issue: No. 2
Keywords: Integrated circuit interconnect;metrology;parallax;tomography
Research Areas: