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|Author(s):||John A. Small;|
|Title:||The Analysis of Particles at Low Accelerating Voltages (<= 10 kV) With Energy Dispersive X-Ray Spectroscopy (EDS)|
|Published:||November 01, 2002|
|Abstract:||In recent years, there have been a series of advancements in electron beam instruments and x-ray detectors which may make it possible to improve significantly the quality of results from the quantitative electron-probe analysis of individual particles. These advances include: (1) field-emission gun electron beam instruments such as scanning electron microscopes, FEG-SEMs, that have high brightness electron guns with excellent performance at low beam energies, EO less than or equal to 10 keV. (2) High-resolution energy-dispersive x-ray spectrometers, like the microcalorimeter detector, that provide high-resolution, less than 10eV, parallel x-ray collection. These devices make it possible to separate low energy less than or equal to 4 keV x-ray lines including the K lines of carbon, nitrogen and oxygen and the L and M lines for elements with atomic numbers in the range of 25-83. In light of these advances, this paper investigates the possibliity of using accelerating voltages less than or equal to 10 kV, as a method to improve the accuracy of elemental analysis for micrometer-sized particles.|
|Citation:||Journal of Research (NIST JRES) -|
|Volume:||107 No. 6|
|Keywords:||electron probe analysis,low voltage analysis,particle analysis,scanning electron microscope,x-ray microanalysis|