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PUBLICATIONS

The Effect of Gaussian Filter Long Wavelength Cutoff in Topography Comparisons and Measurements

Published

Author(s)

Jun-Feng Song, Lijun Ma, Theodore V. Vorburger

Abstract

Five parameters are used for 2D and 3D topography comparisons and measurements, those include two correlation parameters Ds and CCFmax , and three surface parameters: the r-m-s roughness Rq (or Sq for 3D), r-m-s waviness Wq and Gaussian filter long wavelength cutoff.  Their functional relationship is theoretically and experimentally investigated.  It is suggested to use a ratio between Rq (or Sq) and Wq for the optimum selection of the cutoff, by which the roughness topography can be unambiguously extracted from the waviness and form deviations for topography comparisons and measurements.
Proceedings Title
Proceedings of 2006 American Society of Precision Engineering
Conference Dates
October 17-19, 2006
Conference Location
Monterey, CA
Conference Title
2006 American Society of Precision Engineering
Pub Type
Conferences

Keywords

ACF, autocorrelation function, CCF, cross correlation function, profile, surface metrology, topography
Manufacturing and Metrology

Citation

Song, J. , Ma, L. and Vorburger, T. (2006), The Effect of Gaussian Filter Long Wavelength Cutoff in Topography Comparisons and Measurements, Proceedings of 2006 American Society of Precision Engineering, Monterey, CA (Accessed April 20, 2024)

Created January 1, 2006, Updated February 19, 2017