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Publication Citation: Multi-loop control of a nanopositioning mechanism for ultra-precision beam steering

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Author(s): Jason J. Gorman; Nicholas G. Dagalakis; B G. Boone;
Title: Multi-loop control of a nanopositioning mechanism for ultra-precision beam steering
Published: August 08, 2003
Abstract:
Conference: SPIE Vol. 5160
Proceedings: Proceedings of SPIE Vol. 5160
Location: San Diego, CA
Dates: August 4-6, 2003
Keywords: beam jitter;beam steering;Control;Micro/Nano Systems;multi-loop control;nanopositioner;optical communication
Research Areas:
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