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Use of Transfer Artifacts for Small Force Measurement

Published

Author(s)

Gordon A. Shaw, Jon R. Pratt, Richard S. Gates, Mark Reitsma

Abstract

In order for the atomic microscope (AFM) to be used in truly quantatitive studies, a basis within the international system of units (SI) must be established. In order to do this, the microfabricated cantilevers typically used for AFM force measurements must be calibrated in a fashion directly traceable to the SI. This study shows two separate techniques for doing so utilizing direct traceable measurement of force and displacement made on a microfabricated cantilever. The use of this cantilever as a transfer artifact for AFM is also examined.
Proceedings Title
Proceedings of the Society for Experimental Mechanics Annual Meeting
Conference Dates
June 4-8, 2006
Conference Location
St. Louis, MO
Conference Title
Society for Experimental Mechanics Annual Meeting

Keywords

calibration, force, metrology, nanotechnology, scanning probe microscopy

Citation

Shaw, G. , Pratt, J. , Gates, R. and Reitsma, M. (2006), Use of Transfer Artifacts for Small Force Measurement, Proceedings of the Society for Experimental Mechanics Annual Meeting, St. Louis, MO (Accessed April 24, 2024)
Created January 1, 2006, Updated February 19, 2017