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Publication Citation: Virtual Surface Calibration Database

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Author(s): Thomas B. Renegar; Theodore V. Vorburger; Son H. Bui;
Title: Virtual Surface Calibration Database
Published: January 01, 2004
Abstract: This paper presents the development of a virtual surface calibration database for parameter evaluation and algorithm verification. The database runs from a web site at the National Institute of Standards and Technology (NIST), USA. Companies, universities, and instrument manufacturers have Internet access to standard data sets located on a NIST server. They can search and download standard surface profiles from the database to validate the accuracy of their algorithm implementations.
Conference: XI. International Colloquium on Surfaces
Proceedings: Proceedings of XI. International Colloquium on Surfaces, Prod. Ed. M. Dietzsch (Shaker Verlag, Aachen) (2004) Part II
Pages: pp. 93 - 101
Location: Chemnitz, GE
Dates: February 2-3, 2004
Keywords: database,filtering,parameters,software,surface,textures,topography,virtual
Research Areas: Metrology, Manufacturing