| Author(s): |
Thomas B. Renegar; Theodore V. Vorburger; Son H. Bui; |
| Title: |
Virtual Surface Calibration Database |
| Published: |
January 01, 2004 |
| Abstract: |
This paper presents the development of a virtual surface calibration database for parameter evaluation and algorithm verification. The database runs from a web site at the National Institute of Standards and Technology (NIST), USA. Companies, universities, and instrument manufacturers have Internet access to standard data sets located on a NIST server. They can search and download standard surface profiles from the database to validate the accuracy of their algorithm implementations. |
| Conference: |
XI. International Colloquium on Surfaces |
| Proceedings: |
Proceedings of XI. International Colloquium on Surfaces, Prod. Ed. M. Dietzsch (Shaker Verlag, Aachen) (2004) Part II |
| Pages: |
pp. 93 - 101 |
| Location: |
Chemnitz, GE |
| Dates: |
February 2-3, 2004 |
| Keywords: |
database;filtering;parameters;software;surface;textures;topography;virtual |
| Research Areas: |
Metrology, Manufacturing |
