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Publication Citation: A Multiscale Fabrication Approach to Microfluidic System Development

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Author(s): Tony L. Schmitz; John A. Dagata; Brian S. Dutterer; W G. Sawyer;
Title: A Multiscale Fabrication Approach to Microfluidic System Development
Published: January 01, 2004
Abstract: Microfluidic systems for analytical, medical, and sensing applications integrate optical or electrical readouts in low-cost, low-volume consumption systems. Embedding chemically functionalized templates with nanoscale topography within these devices links the scale at which molecular recognition and self-organization occurs and the macroscopic layout of fluid channels, mixing volumes, and detection regions. This paper addresses a path toward standardization of manufacturing procedures for microfluidic devices through: 1) scanning probe lithography to produce sub-50-nm scale features in a silicon master; 2) master replication in plastics by hot embossing; and 3) the development of a generic microfluidic experimental platform that orients 125 micrometer channels embossed in a poly (vinyl chloride) gasket to an array of high-speed machined channels and a silicon substrate.
Citation: J. Manufacturing Processes
Volume: 6
Keywords: machining;micro-forming;nano-lithography
Research Areas: Metrology, Manufacturing