NIST Authors in Bold
| Author(s): | Tony L. Schmitz; John A. Dagata; Brian S. Dutterer; W G. Sawyer; |
|---|---|
| Title: | A Multiscale Fabrication Approach to Microfluidic System Development |
| Published: | January 01, 2004 |
| Abstract: | Microfluidic systems for analytical, medical, and sensing applications integrate optical or electrical readouts in low-cost, low-volume consumption systems. Embedding chemically functionalized templates with nanoscale topography within these devices links the scale at which molecular recognition and self-organization occurs and the macroscopic layout of fluid channels, mixing volumes, and detection regions. This paper addresses a path toward standardization of manufacturing procedures for microfluidic devices through: 1) scanning probe lithography to produce sub-50-nm scale features in a silicon master; 2) master replication in plastics by hot embossing; and 3) the development of a generic microfluidic experimental platform that orients 125 micrometer channels embossed in a poly (vinyl chloride) gasket to an array of high-speed machined channels and a silicon substrate. |
| Citation: | J. Manufacturing Processes |
| Volume: | 6 |
| Keywords: | machining;micro-forming;nano-lithography |
| Research Areas: | Metrology, Manufacturing |