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NIST Authors in Bold
|Author(s):||Tony L. Schmitz; John A. Dagata; Brian S. Dutterer; W G. Sawyer;|
|Title:||A Multiscale Fabrication Approach to Microfluidic System Development|
|Published:||January 01, 2004|
|Abstract:||Microfluidic systems for analytical, medical, and sensing applications integrate optical or electrical readouts in low-cost, low-volume consumption systems. Embedding chemically functionalized templates with nanoscale topography within these devices links the scale at which molecular recognition and self-organization occurs and the macroscopic layout of fluid channels, mixing volumes, and detection regions. This paper addresses a path toward standardization of manufacturing procedures for microfluidic devices through: 1) scanning probe lithography to produce sub-50-nm scale features in a silicon master; 2) master replication in plastics by hot embossing; and 3) the development of a generic microfluidic experimental platform that orients 125 micrometer channels embossed in a poly (vinyl chloride) gasket to an array of high-speed machined channels and a silicon substrate.|
|Citation:||J. Manufacturing Processes|
|Research Areas:||Metrology, Manufacturing|