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Publication Citation: Studies of Samples Having Shallow Surface Topography by the Low-Loss Electron (LLE) Method in the Scanning Electron Microscope (SEM)

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Author(s): O C. Wells; M Mcglashen-powell; Michael T. Postek; Andras Vladar;
Title: Studies of Samples Having Shallow Surface Topography by the Low-Loss Electron (LLE) Method in the Scanning Electron Microscope (SEM)
Published: March 01, 2002
Abstract:
Citation: Scanning
Volume: 22(2)
Pages: pp. 110 - 110
Research Areas: Metrology, Manufacturing