| Author(s): |
Lowell P. Howard; Jack A. Stone Jr; |
| Title: |
Real-Time Displacement Measurements With a Fabry-Perot Cavity and a Diode Laser |
| Published: |
January 01, 2000 |
| Abstract: |
We present the basic operating principles of a traceable measurement system for use with scanned probe microscopes and nanometer-resolution displacement sensors. Our method is based upon a tunable external-cavity diode laser system which is Pound-Drever-Hall locked to a Fabry-Perot interferometer cavity with mechanical considerations taken for its use as a displacement metrology system. We discuss methods for making real-time measurements of the wide-bandwidth optical heterodyne signals our interferometer system produces. We report initial results using the system to examine known optical mixing errors in a heterodyne Michelson interferometer. |
| Citation: |
Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology |
| Volume: |
25 |
| Issue: |
4 |
| Pages: |
15 pp. |
| Keywords: |
diode laser;Fabry-Perot interferometer;microwave frequency counter;nanometrology;optical heterodyne frequency measurement;optical mixing errors |
| Research Areas: |
Metrology, Manufacturing |
