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NIST Authors in Bold
|Author(s):||Lowell P. Howard; Jack A. Stone Jr.;|
|Title:||Real-Time Displacement Measurements With a Fabry-Perot Cavity and a Diode Laser|
|Published:||January 01, 2000|
|Abstract:||We present the basic operating principles of a traceable measurement system for use with scanned probe microscopes and nanometer-resolution displacement sensors. Our method is based upon a tunable external-cavity diode laser system which is Pound-Drever-Hall locked to a Fabry-Perot interferometer cavity with mechanical considerations taken for its use as a displacement metrology system. We discuss methods for making real-time measurements of the wide-bandwidth optical heterodyne signals our interferometer system produces. We report initial results using the system to examine known optical mixing errors in a heterodyne Michelson interferometer.|
|Citation:||Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology|
|Keywords:||diode laser,Fabry-Perot interferometer,microwave frequency counter,nanometrology,optical heterodyne frequency measurement,optical mixing errors|
|Research Areas:||Manufacturing, Metrology|