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Publication Citation: Real-Time Displacement Measurements With a Fabry-Perot Cavity and a Diode Laser

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Author(s): Lowell P. Howard; Jack A. Stone Jr;
Title: Real-Time Displacement Measurements With a Fabry-Perot Cavity and a Diode Laser
Published: January 01, 2000
Abstract: We present the basic operating principles of a traceable measurement system for use with scanned probe microscopes and nanometer-resolution displacement sensors. Our method is based upon a tunable external-cavity diode laser system which is Pound-Drever-Hall locked to a Fabry-Perot interferometer cavity with mechanical considerations taken for its use as a displacement metrology system. We discuss methods for making real-time measurements of the wide-bandwidth optical heterodyne signals our interferometer system produces. We report initial results using the system to examine known optical mixing errors in a heterodyne Michelson interferometer.
Citation: Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology
Volume: 25
Issue: 4
Pages: 15 pp.
Keywords: diode laser;Fabry-Perot interferometer;microwave frequency counter;nanometrology;optical heterodyne frequency measurement;optical mixing errors
Research Areas: Metrology, Manufacturing