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NIST Authors in Bold
|Author(s):||Michael T. Postek; Marylyn H. Bennett; N J. Zaluzec;|
|Title:||Telepresence: A New Paradigm for Industrial and Scientific Collaboration|
|Published:||June 01, 1999|
|Abstract:||The successful development of a collaboratory for Telepresence Microscopy (TPM) provides an important new tool to promote technology transfer in the areas of measurement technology. NIST and Texas Instruments (TI), under the auspices of the National Automated Manufacturing Testbed (NAMT) and in collaboration with the University of Illinois (UIC) and Argonne National Laboratory (ANL) have developed a collaboratory testbed to demonstrate the value of TPM within organizations having a large distributed manufacturing facility such as Texas Instruments and between scientific research organizations such as NIST, ANL, and UIC. Large distributed manufacturing sites such as TI need rapid response when problems threaten to disrupt multi-million dollar production facilities. This is particularly important when expertise needed to solve the problem or instrumentation is not locally present. The resulting delays are inevitable and often costly. Telepresence minimizes these delays.|
|Conference:||New Technology/New Approaches To Metrology|
|Proceedings:||Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XIII, Bhanwar Singh, Editor|
|Pages:||pp. 599 - 610|
|Location:||Santa Clara, CA|
|Dates:||March 15, 1999|
|Keywords:||analytical,collaboratory,internet,scanning electron microscope,telepresence,transmission electron microscope|
|Research Areas:||Manufacturing, Metrology|