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Publication Citation: Accurate Force Measurements for Miniature Mechanical Systems: A Review of Progress

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Author(s): Lowell P. Howard; Joseph Fu;
Title: Accurate Force Measurements for Miniature Mechanical Systems: A Review of Progress
Published: September 01, 1997
Abstract: A survey of nanonewton force calibration techniques suitable for micro-electromechanical systems (MEMS) is presented. The reviewed techniques include: mass-derived force, pendulums, calibrated master spings, resonance and electromagnetic techniques. Considerable background material is provided to support the hypothesis that virtual power methods, such as those employed on the NIST watt balance, are applicable to the MEMS force calibration problem. A review of progress at NIST on two prototype nanowatt balances designed for MEMS calibration is given.
Conference: Micrometrology Techniques
Proceedings: Proceedings of SPIE, Microlithography and Metrology in Micromachining III, Craig R. Friedrich, Akira Umeda, Editors
Volume: 3225
Pages: pp. 2 - 11
Location: Austin, TX
Dates: September 29, 1997
Keywords: AFM;force measurement;MEMS;nanonewton
Research Areas: Metrology, Manufacturing