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Publication Citation: Corrections for Wavelength Variations in Precision Interferometric Displacement Measurements

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Author(s): Jack A. Stone Jr; Steven D. Phillips; G Mandolfo;
Title: Corrections for Wavelength Variations in Precision Interferometric Displacement Measurements
Published: September 01, 1996
Abstract: Precision interferometric displacement measurements require deadpath corrections to account for variations in wavelength during the course of the measurement. This paper discusses common errors in applying deadpath corrections and describes the correction necessary to fully account for variations in wavelength.
Citation: Journal of Research at the National Institute of Standards and Technology
Volume: 101(5)
Pages: pp. 671 - 674
Keywords: deadpath;interferometry
Research Areas: Metrology, Manufacturing