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Publication Citation: Models for Relating Scanning Electron Microscopy Images to Measured Artifacts

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Author(s): Michael T. Postek; Andras Vladar; J R. Lowney;
Title: Models for Relating Scanning Electron Microscopy Images to Measured Artifacts
Published: April 01, 1996
Abstract: A specific example of a technique we developed to enhance the information obtained from SEM images is the extraction of an approximate profile corresponding to an electron beam with zero beam diameter from one with a finite beam diameter. Results were obtained for the simulated backscattered and secondary electron yields, respectively, from a 1 um step in a silicon substrate at 1 keV beam energy. Finer detail has been extracted from the original signal by this method, and allows for more information to be obtained about the target geometry.
Citation: Proceedings of Scanning 96
Volume: 18(3)
Pages: pp. 179 - 180
Research Areas: Metrology, Manufacturing