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Publication Citation: A Method for the Spatial Calibration of a Commercial Phase Measuring Interferometer-Practical Implementation

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Author(s): P Sullivan; Christopher J. Evans;
Title: A Method for the Spatial Calibration of a Commercial Phase Measuring Interferometer-Practical Implementation
Published: October 01, 1994
Abstract: Abstract not available.
Proceedings: Proceedings of ASPE Ninth Annual Conference
Volume: 3
Research Areas: Metrology, Manufacturing