Publication Citation
NIST Authors in Bold
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| Author(s): | S. Perkowitz; David G. Seiler; William Duncan; |
|---|---|
| Title: | Optical Characterization in Microelectronics Manufacturing |
| Published: | September 01, 1994 |
| Abstract: | |
| Citation: | Journal of Research (NIST JRES) - |
| Research Areas: | |
| PDF version: |  Click here to retrieve PDF version of paper (9MB) |