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Publication Citation: Electrical Characterization of Beta Silicon Carbide MIS Capacitors with Thermally Grown or Chemical-Vapor-Deposited Oxides

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Author(s): Joseph J. Kopanski; Donald B. Novotny;
Title: Electrical Characterization of Beta Silicon Carbide MIS Capacitors with Thermally Grown or Chemical-Vapor-Deposited Oxides
Published: December 31, 1989
Abstract:
Proceedings: Extended Abstracts of the Electrochemical Society
Pages: pp. 722 - 723
Location: Hollywood, FL
Dates: October 15-20, 1989
Research Areas: