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|Author(s):||James Moyne; YaShian Li-Baboud; Xiao Zhu; Dhananjay Anand; Sulaiman Hussain;|
|Title:||Semiconductor Manufacturing Equipment Data Acquisition Simulation for Timing Performance Analysis|
|Published:||September 22, 2008|
|Abstract:||The ability to acquire quality equipment and process data is pertinent for future real-time process control systems to maximize opportunities for semiconductor manufacturing yield enhancement and equipment efficiency. Clock synchronization for accurate time-stamping and maintaining a consistent frequency in trace data collection are essential for accurate merging of data from heterogeneous sources. To characterize the factors impacting data collection synchronization and performance, a configurable fab-wide equipment data acquisition (EDA) simulator is being developed. By understanding the factors impacting clock synchronization and accurate time-stamping, the simulator can also be used to explore methods to mitigate the latencies and provide guidance on time-stamping for equipment data acquisition systems.|
|Proceedings:||ISPCS 2008 International IEEE Symposium on Precision Clock Synchronization for Measurement, Control and Communication|
|Pages:||pp. 77 - 82|
|Location:||Ann Arbor, MI|
|Dates:||September 22-26, 2008|
|Keywords:||time synchronization, data acquisition, semiconductor manufacturing, data quality, Equipment Data Acquisition standard|
|Research Areas:||Manufacturing, Sensors|
|PDF version:||Click here to retrieve PDF version of paper (778KB)|