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Publication Citation: Semiconductor Manufacturing Equipment Data Acquisition Simulation for Timing Performance Analysis

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Author(s): James Moyne; YaShian Li-Baboud; Xiao Zhu; Dhananjay Anand; Sulaiman Hussain;
Title: Semiconductor Manufacturing Equipment Data Acquisition Simulation for Timing Performance Analysis
Published: September 22, 2008
Abstract: The ability to acquire quality equipment and process data is pertinent for future real-time process control systems to maximize opportunities for semiconductor manufacturing yield enhancement and equipment efficiency. Clock synchronization for accurate time-stamping and maintaining a consistent frequency in trace data collection are essential for accurate merging of data from heterogeneous sources. To characterize the factors impacting data collection synchronization and performance, a configurable fab-wide equipment data acquisition (EDA) simulator is being developed. By understanding the factors impacting clock synchronization and accurate time-stamping, the simulator can also be used to explore methods to mitigate the latencies and provide guidance on time-stamping for equipment data acquisition systems.
Proceedings: ISPCS 2008 International IEEE Symposium on Precision Clock Synchronization for Measurement, Control and Communication
Pages: pp. 77 - 82
Location: Ann Arbor, MI
Dates: September 22-26, 2008
Keywords: time synchronization, data acquisition, semiconductor manufacturing, data quality, Equipment Data Acquisition standard
Research Areas: Sensors, Manufacturing
PDF version: PDF Document Click here to retrieve PDF version of paper (778KB)