Semiconductor Manufacturing Equipment Data Acquisition Simulation for Timing Performance Analysis

Published

September 22, 2008

Author(s)

James Moyne, Ya-Shian Li-Baboud, Xiao Zhu, Dhananjay Anand, Sulaiman Hussain

Abstract

The ability to acquire quality equipment and process data is pertinent for future real-time process control systems to maximize opportunities for semiconductor manufacturing yield enhancement and equipment efficiency. Clock synchronization for accurate time-stamping and maintaining a consistent frequency in trace data collection are essential for accurate merging of data from heterogeneous sources. To characterize the factors impacting data collection synchronization and performance, a configurable fab-wide equipment data acquisition (EDA) simulator is being developed. By understanding the factors impacting clock synchronization and accurate time-stamping, the simulator can also be used to explore methods to mitigate the latencies and provide guidance on time-stamping for equipment data acquisition systems.

Proceedings Title

ISPCS 2008 International IEEE Symposium on Precision Clock Synchronization for Measurement, Control and Communication

Conference Dates

September 22-26, 2008

Conference Location

Ann Arbor, MI, US

Pub Type

Conferences

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Local Download

Keywords

time synchronization, data acquisition, semiconductor manufacturing, data quality, Equipment Data Acquisition standard

Citation

Moyne, J. , Li-Baboud, Y. , Zhu, X. , Anand, D. and Hussain, S. (2008), Semiconductor Manufacturing Equipment Data Acquisition Simulation for Timing Performance Analysis, ISPCS 2008 International IEEE Symposium on Precision Clock Synchronization for Measurement, Control and Communication, Ann Arbor, MI, US, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=33160 (Accessed April 24, 2024)