Publication Citation
NIST Authors in Bold
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| Author(s): | Joseph J. Kopanski; Jay F. Marchiando; David W. Berning; |
|---|---|
| Title: | Scanning Capacitance Microscopy Measurement of 2-D Dopant Profiles across Junctions |
| Published: | December 31, 1997 |
| Abstract: | |
| Proceedings: | Proc., International Workshop on the Measurement and Characterization of Ultrashallow Doping Profiles in Semiconductors |
| Pages: | pp. 53.1 - 53.9 |
| Location: | Research Triangle Park, NC |
| Dates: | April 6-9, 1997 |
| Research Areas: |