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Publication Citation: Scanning Capacitance Microscopy Measurement of 2-D Dopant Profiles across Junctions

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Author(s): Joseph J. Kopanski; Jay F. Marchiando; David W. Berning;
Title: Scanning Capacitance Microscopy Measurement of 2-D Dopant Profiles across Junctions
Published: December 31, 1997
Abstract:
Proceedings: Proc., International Workshop on the Measurement and Characterization of Ultrashallow Doping Profiles in Semiconductors
Pages: pp. 53.1 - 53.9
Location: Research Triangle Park, NC
Dates: April 6-9, 1997
Research Areas: