Lipe Jr., T.
, Kinard Jr., J.
and Scarioni, L.
(2008),
Design And Fabrication Of MJTCs On Quartz Substrates At NIST, IEEE Transactions on Instrumentation and Measurement, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=33053
(Accessed April 16, 2024)
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Design And Fabrication Of MJTCs On Quartz Substrates At NIST
Published
Author(s)
, , Luciana Scarioni
Abstract
Wet and dry etching are employed in the fabrication of new planar, thin-film multijunction thermal converters (MJTCs) on quartz membranes and crystalline quartz chips at NIST. The use of crystalline quartz as a material for the membrane and for the chip improves the performance of the MJTC in the frequency range from 100 kHz to 100 MHz. Simulations of the ac-dc voltage transfer difference for a heater resistance of 400 Ω in the frequency range from 1 MHz to 100 MHz show a reduction in the ac-dc transfer difference of more than one order of magnitude in comparison with MJTCs fabricated on silicon chips.Citation
IEEE Transactions on Instrumentation and Measurement
Pub Type
Journals
Download Paper
Keywords
ac-dc, converter, multijunction, planar, quartz, thermal, thin-film, voltage
Citation
Created May 31, 2008, Updated October 12, 2021