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Publication Citation: Metrology, Nanocharacterization and Instrumentation for Emerging Nanotechnology and Nanoelectronics: Electrical and Optical Characterization

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Author(s): David G. Seiler;
Title: Metrology, Nanocharacterization and Instrumentation for Emerging Nanotechnology and Nanoelectronics: Electrical and Optical Characterization
Published: December 09, 2007
Abstract:
Citation: Metrology, Nanocharacterization, and Instrumentation for Emerging Nanotechnology and Nanoelectronics
Pages: 35 pp.
Research Areas: Semiconductor Materials