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Publication Citation: Frontiers of Characterization and Metrology for Nanoelectronics: 2007

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Author(s): David G. Seiler; Alain C. Diebold; Robert McDonald; C M. Garner; Dan Herr; Rajinder P. Khosla; Erik M. Secula;
Title: Frontiers of Characterization and Metrology for Nanoelectronics: 2007
Published: September 30, 2007
Abstract:
Citation: Frontiers of Characterization and Metrology for Nanoelectronics
Publisher: American Institute of Physics, Melville, NY
Volume: 931
Pages: pp. 1 - 603
Research Areas: