Publication Citation
NIST Authors in Bold
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| Author(s): | David G. Seiler; Alain C. Diebold; Robert McDonald; C M. Garner; Dan Herr; Rajinder P. Khosla; Erik M. Secula; |
|---|---|
| Title: | Frontiers of Characterization and Metrology for Nanoelectronics: 2007 |
| Published: | September 30, 2007 |
| Abstract: | |
| Citation: | Frontiers of Characterization and Metrology for Nanoelectronics |
| Publisher: | American Institute of Physics, Melville, NY |
| Volume: | 931 |
| Pages: | pp. 1 - 603 |
| Research Areas: |