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Publication Citation: Fabrication and Characterization of Patterned Single-Crystal Silicon Nanolines

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Author(s): Bin Li; Min K. Kang; Kuan Lu; Rui Huang; Paul S. Ho; Richard A. Allen; Michael W. Cresswell;
Title: Fabrication and Characterization of Patterned Single-Crystal Silicon Nanolines
Published: December 07, 2007
Abstract: This letter demonstrates a method to fabricate single-crystal Si nanolines, with a rectangular cross section and atomically flat sidewalls. The high quality of these nanolines leads to superb mechanical properties, with the strain to fracture estimated by nanoindentation tests close to the theoretical limit. A large displacement burst before fracture was observed, which is attributed to a buckling mechanism. Numerical simulations show that the critical load for buckling depends on the friction at the contact surface.
Citation: Nano Letters
Volume: 8
Issue: 1
Pages: pp. 92 - 98
Keywords: buckling;displacement burst;fabrication;fracture;friction;gratings;lattice-plane-selective etching;MEMS;nano-indentation measurement;nano-line;silicon;simulation;strain
Research Areas: Nanoelectronics and Nanoscale Electronics
PDF version: PDF Document Click here to retrieve PDF version of paper (404KB)