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Publication Citation: Special Section on the International Conference on Frontiers of Characterization and Metrology for Nanoelectronics

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Author(s): David G. Seiler;
Title: Special Section on the International Conference on Frontiers of Characterization and Metrology for Nanoelectronics
Published: November 01, 2006
Abstract: Since 1995, the International Conference on Frontiers of Characterization and Metrology for Nanoelectronics (formerly titled "Characterization and Metrology for ULSI Technology") has provided a forum for the characterization and metrology community to meet and discuss important breakthroughs and challenges that directly and indirectly affect manufacturing. The methods and techniques have included all approaches: chemical and physical, electrical, optical, in-situ, and real-time control and monitoring.
Citation: IEEE Transactions on Semiconductor Manufacturing
Pages: pp. 371 - 371
Keywords: characterization;conference;metrology;nanoelectronics
Research Areas:
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