| Author(s): |
Joaquin (. Martinez; Stephen Knight; |
| Title: |
Support of the National Institute of Standards and Technology to Industry The Semiconductor Industry |
| Published: |
October 27, 2006 |
| Abstract: |
The National Institute of Standards and Technology NIST is a United States Government Agency that develops metrology for the use and advancement of industry. The Office of Microelectronics Industry OMP is supporting the semiconductor industry. We discuss some of the research projects at NIST in support of this industry as an example of how NIST fulfills its mission in support of industry. |
| Conference: |
Symposium of Metrology 2006, Reliable Measurements for the Development of Mexico |
| Pages: |
pp. 1 - 6 |
| Location: |
Queretaro, MX |
| Dates: |
October 25-27, 2006 |
| Keywords: |
industry;lithography;metrology;microcalorimeter;microelectronics;research;semiconductor |
| Research Areas: |
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