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Publication Citation: Precise Alignment of single Nanowires and Fabrication of Nanoelectromechanical Switch and Other Test Structures

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Author(s): Qiliang Li; Sang-Mo Koo; Curt A. Richter; Monica D. Edelstein; John E. Bonevich; Joseph J. Kopanski; John S. Suehle; Eric M. Vogel;
Title: Precise Alignment of single Nanowires and Fabrication of Nanoelectromechanical Switch and Other Test Structures
Published: March 01, 2007
Abstract: The integration of nanowires and nanotubes into electrical test structures to investigate their nanoelectronic transport properties is a significant challenge. Here we present a single nanowire manipulating system to precisely manipulate and align individual nanowires. We show that a single nanowire can be picked up and transferred to a pre-defined location by electrostatic force. Compatible fabrication processes have been developed to simultaneously pattern multiple aligned nanowires by using one-level of photolithography. In addition, we have fabricated and characterized representative devices and test structures including nanoelectromechanical switches with large on/off current ratios, bottom-gated silicon nanowire field-effect transistors, and both transfer-length-method and Kelvin test structures.
Citation: IEEE Transactions on Nanotechnology
Volume: 6
Issue: 2
Pages: pp. 256 - 262
Keywords: contact resistance, nanoelectromechanical switch;Kelvin test structure;silicon nanowire;Transfer Length Method
Research Areas:
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