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Publication Citation: Traceable Calibration of Critical-dimension Atomic Force Microscope Linewidth Measurements with Nanometer Uncertainty

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Author(s): Ronald G. Dixson; Richard A. Allen; William F. Guthrie; Michael W. Cresswell;
Title: Traceable Calibration of Critical-dimension Atomic Force Microscope Linewidth Measurements with Nanometer Uncertainty
Published: November 30, 2005
Abstract:
Citation: Journal of Vacuum Science and Technology B
Volume: 23
Issue: 6
Pages: pp. 3028 - 3032
Research Areas: Semiconductors
PDF version: PDF Document Click here to retrieve PDF version of paper (247KB)