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PUBLICATIONS

Traceable Calibration of Critical-Dimension Atomic Force Microscope Linewidth Measurements with Nanometer Uncertainty

Published

Author(s)

Ronald G. Dixson, Richard A. Allen, William F. Guthrie, Michael W. Cresswell
Citation
Journal of Vacuum Science and Technology B
Volume
23
Issue
6
Pub Type
Journals

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Semiconductors

Citation

Dixson, R. , Allen, R. , Guthrie, W. and Cresswell, M. (2005), Traceable Calibration of Critical-Dimension Atomic Force Microscope Linewidth Measurements with Nanometer Uncertainty, Journal of Vacuum Science and Technology B, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32210 (Accessed April 19, 2024)

Created November 29, 2005, Updated October 12, 2021