Publication Citation
NIST Authors in Bold
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| Author(s): | Ronald G. Dixson; Richard A. Allen; William F. Guthrie; Michael W. Cresswell; |
|---|---|
| Title: | Traceable Calibration of Critical-dimension Atomic Force Microscope Linewidth Measurements with Nanometer Uncertainty |
| Published: | November 30, 2005 |
| Abstract: | |
| Citation: | Journal of Vacuum Science and Technology B |
| Volume: | 23 |
| Issue: | 6 |
| Pages: | pp. 3028 - 3032 |
| Research Areas: | Semiconductors |
| PDF version: |  Click here to retrieve PDF version of paper (241KB) |