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Publication Citation: Characterization and Metrology for ULSI Technology: 2005

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Author(s): David G. Seiler; Alain C. Diebold; Robert McDonald; Caroline Ayre; Rajinder P. Khosla; Stefan Zollner; Erik M. Secula;
Title: Characterization and Metrology for ULSI Technology: 2005
Published: September 28, 2005
Abstract:
Citation: Characterization and Metrology for ULSI Technology: 2005
Publisher: American Institute of Physics, Melville, NY
Volume: 788
Pages: pp. 1 - 667
Research Areas: