Publication Citation
NIST Authors in Bold
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| Author(s): | Terrence J. Jach; Joseph A. Dura; Nhan V. Nguyen; J Swider; G Cappello; Curt A. Richter; |
|---|---|
| Title: | Comparative Thickness Measurements of SiO2/Si Films for Thicknesses Less than 10 nm |
| Published: | January 01, 2004 |
| Abstract: | |
| Citation: | Surface and Interface Analysis |
| Volume: | 36 |
| Issue: | 1 |
| Pages: | pp. 23 - 29 |
| Research Areas: |