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Publication Citation: Comparative Thickness Measurements of SiO2/Si Films for Thicknesses Less than 10 nm

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Author(s): Terrence J. Jach; Joseph A. Dura; Nhan V. Nguyen; J Swider; G Cappello; Curt A. Richter;
Title: Comparative Thickness Measurements of SiO2/Si Films for Thicknesses Less than 10 nm
Published: January 01, 2004
Abstract:
Citation: Surface and Interface Analysis
Volume: 36
Issue: 1
Pages: pp. 23 - 29
Research Areas: