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Publication Citation: Characterization and Metrology for ULSI Technology: 2003

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Author(s): David G. Seiler; Alain C. Diebold; Thomas J. Shaffner; Robert McDonald; Stefan Zollner; Rajinder P. Khosla; Erik M. Secula;
Title: Characterization and Metrology for ULSI Technology: 2003
Published: September 30, 2003
Abstract:
Citation: Characterization and Metrology for ULSI Technology: 2003
Publisher: American Institute of Physics, Melville, NY
Volume: 683
Pages: pp. 1 - 812
Research Areas: