Publication Citation
NIST Authors in Bold
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| Author(s): | David G. Seiler; Alain C. Diebold; Thomas J. Shaffner; Robert McDonald; Stefan Zollner; Rajinder P. Khosla; Erik M. Secula; |
|---|---|
| Title: | Characterization and Metrology for ULSI Technology: 2003 |
| Published: | September 30, 2003 |
| Abstract: | |
| Citation: | Characterization and Metrology for ULSI Technology: 2003 |
| Publisher: | American Institute of Physics, Melville, NY |
| Volume: | 683 |
| Pages: | pp. 1 - 812 |
| Research Areas: |