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Publication Citation: Semiconductor Electronics Division

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Author(s): David G. Seiler; Erik M. Secula;
Title: Semiconductor Electronics Division
Published: September 30, 2003
Abstract: This is a high-level, full-color brochure detailing the activities and challenges of the Semiconductor Electronics Division. Topics include Division history, nanotechnology, MEMS, electrical test structures, power electronics, optical and electrical measurements, gate dielectrics, and super transistors.
Citation: NIST Interagency/Internal Report (NISTIR) -
Pages: 14 pp.
Keywords: mems;nanotechnology;semiconductor;test structures;transistors
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