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Publication Citation: Challenges of Metrology and Characterization Measurements for ULSI Technology

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Author(s): David G. Seiler; Thomas J. Shaffner;
Title: Challenges of Metrology and Characterization Measurements for ULSI Technology
Published: January 01, 2001
Abstract:
Conference: 4th RIPE Symposium
Proceedings: Proc., 4th RIPE Symposium
Pages: pp. 84 - 92
Location: Tokyo, JA
Dates: November 20-24, 2000
Research Areas: