Publication Citation
NIST Authors in Bold
 |
| Author(s): | David G. Seiler; Thomas J. Shaffner; |
|---|---|
| Title: | Challenges of Metrology and Characterization Measurements for ULSI Technology |
| Published: | January 01, 2001 |
| Abstract: | |
| Conference: | 4th RIPE Symposium |
| Proceedings: | Proc., 4th RIPE Symposium |
| Pages: | pp. 84 - 92 |
| Location: | Tokyo, JA |
| Dates: | November 20-24, 2000 |
| Research Areas: |