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PUBLICATIONS

MEMS Length and Strain Measurements Using an Optical Interferometer

Published

Author(s)

Janet M. Cassard
Citation
NIST Interagency/Internal Report (NISTIR) - 6779
Report Number
6779
NIST Pub Series
NIST Interagency/Internal Report (NISTIR)
Pub Type
NIST Pubs

Download Paper

https://doi.org/10.6028/NIST.IR.6779

Citation

Cassard, J. (2001), MEMS Length and Strain Measurements Using an Optical Interferometer, NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/NIST.IR.6779 (Accessed April 24, 2024)

Created August 21, 2001, Updated January 27, 2020