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Publication Citation: Scanning Capacitance Microscopy Measurements and Modeling: Progress Towards Dopant Profiling of Silicon

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Author(s): Joseph J. Kopanski; Jay F. Marchiando; J R. Lowney;
Title: Scanning Capacitance Microscopy Measurements and Modeling: Progress Towards Dopant Profiling of Silicon
Published: February 01, 1996
Abstract:
Citation: Journal of Vacuum Science and Technology
Volume: B 14
Issue: 1
Pages: pp. 242 - 247
Research Areas: