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Publication Citation: Intermittent-Contact Scanning Capacitance Microscopy Imaging and Modeling for Overlay Metrology

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Author(s): Santos D. Mayo; Joseph J. Kopanski; William F. Guthrie;
Title: Intermittent-Contact Scanning Capacitance Microscopy Imaging and Modeling for Overlay Metrology
Published: December 31, 1998
Abstract:
Proceedings: Proc., 1998 International Conference on Characterization and Metrology for ULSI Technology
Pages: pp. 567 - 572
Location: Gaithersburg, MD
Dates: March 23-27, 1998
Keywords: 2 D modeling;overlay metrology;scanning capacitance microscopy;SCM;scanning probe microscopy;SPM;test pattern;
Research Areas: