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Publication Citation: Scanning Capacitance Microscopy for Profiling PN-Junctions in Silicon

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Author(s): Joseph J. Kopanski; Jay F. Marchiando; J R. Lowney; David G. Seiler;
Title: Scanning Capacitance Microscopy for Profiling PN-Junctions in Silicon
Published: December 01, 1994
Abstract:
Citation: NIST Interagency/Internal Report (NISTIR) -
Research Areas: