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Publication Citation: Electron Interactions with Plasma Processing Gases: An Update for CF4, CHF3, C2F6 and C3F8

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Author(s): Loucas G. Christophorou; James K. Olthoff;
Title: Electron Interactions with Plasma Processing Gases: An Update for CF4, CHF3, C2F6 and C3F8
Published: December 01, 1999
Abstract: An update of electron-collision cross sections and electron transport parameters is presented for CF4, CHF3, C2F6, and C3F8.
Citation: Journal of Physical and Chemical Reference Data
Volume: 28
Issue: 4
Pages: pp. 967 - 982
Keywords: ;CF4;C2F6;C3F8;CHF3;cross sections;electron-interactions;scattering;transport coefficients;
Research Areas: Electronics & Telecommunications
PDF version: PDF Document Click here to retrieve PDF version of paper (8MB)