| Author(s): |
Loucas G. Christophorou; James K. Olthoff; |
| Title: |
Electron Interactions with Plasma Processing Gases: An Update for CF4, CHF3, C2F6 and C3F8 |
| Published: |
December 01, 1999 |
| Abstract: |
An update of electron-collision cross sections and electron transport parameters is presented for CF4, CHF3, C2F6, and C3F8. |
| Citation: |
Journal of Physical and Chemical Reference Data |
| Volume: |
28 |
| Issue: |
4 |
| Pages: |
pp. 967 - 982 |
| Keywords: |
;CF4;C2F6;C3F8;CHF3;cross sections;electron-interactions;scattering;transport coefficients; |
| Research Areas: |
Electronics & Telecommunications |
| PDF version: |
 Click here to retrieve PDF version of paper (8MB) |
