Publication Citation
NIST Authors in Bold
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| Author(s): | Joseph J. Kopanski; Jay F. Marchiando; David W. Berning; R. Alvis; H. E. Smith; |
|---|---|
| Title: | Scanning Capacitance Microscopy Measurement of 2-D Dopant Profiles Across Junctions |
| Published: | January 01, 1998 |
| Abstract: | |
| Citation: | Journal of Vacuum Science and Technology |
| Research Areas: |