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Publication Citation: Scanning Capacitance Microscopy Measurement of 2-D Dopant Profiles Across Junctions

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Author(s): Joseph J. Kopanski; Jay F. Marchiando; David W. Berning; R. Alvis; H. E. Smith;
Title: Scanning Capacitance Microscopy Measurement of 2-D Dopant Profiles Across Junctions
Published: January 01, 1998
Abstract:
Citation: Journal of Vacuum Science and Technology
Research Areas: